The XDV-μ series is designed for precise coating thickness measurement and material analysis on very delicate structures. All devices are equipped with polycapillary optics that focus the X-ray beam, making measuring spots (fwhm) with diameters between 10 and 60 μm possible. The high intensity of the focused radiation results in a short measuring duration. Besides the universally applicable XDV-μ, specialized devices are also available for the electronics and semiconductor industries. For example, the XDV-μ LD is optimized for measuring on printed circuit boards, while the XDV-μ Wafer is intended for use in clean rooms.

XDV-µ for testing the smallest of structures


  • Advanced polycapillary X-ray optics that focus the X-rays onto extremely small measurement surfaces
  • Modern silicon drift detector (SDD), ensuring good detection sensitivity
  • Programmable measuring stage with expandable sample support for automated testing
  • Specialized devices for specialized applications, including:
    • XDV-μ LD, featuring a large measuring distance (at least 12 mm)
    • XDV-μ LEAD FRAME, specially optimized for measuring of lead frame coatings such as Au / Pd / Ni / CuFe
    • XDV-μ wafer, featuring an automated wafer chuck system


Coating Thickness Measurement

  • Measurement on both bare and assembled printed circuit boards
  • Analysis of complex coating systems in the nanometer range, e.g. Au / Pd / Ni / CuFe on lead frames
  • Automated quality inspection of wafers up to 12 inches in diameter
  • Testing of base metallization layers (under-bump metallization, UBM) in the nanometer range
  • Compliant with DIN EN ISO 3497 and ASTM B568

Material Analysis

  • Analysis of very light elements such as sodium
  • Analysis of lead-free solder caps on copper pillars
  • Testing the elemental composition of C4 and smaller solder bumps, as well as small contact surfaces in the semiconductor industry

Your contact to FISCHER


Helmut Fischer Meettechniek B.V.
Tarasconweg 10
Phone: +31 40 248 22 55
E-Mail: info@helmutfischer.nl
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